Effect of Au on the crystallization of germanium thin films by electron-beam evaporation


EYGİ Z. D. , KULAKCI M., TURAN R.

APPLIED SURFACE SCIENCE, cilt.318, ss.116-120, 2014 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 318
  • Basım Tarihi: 2014
  • Doi Numarası: 10.1016/j.apsusc.2014.01.145
  • Dergi Adı: APPLIED SURFACE SCIENCE
  • Sayfa Sayıları: ss.116-120

Özet

Metal induced crystallization is a widely used method to form crystalline/polycrystalline structures at low temperatures. In this work, Au was applied to enhance the crystallization of amorphous Ge films. Ge films with thicknesses of similar to 1.5 mu m were fabricated by electron beam evaporation on c-Si substrate with and without very thin Au layer. Crystallization properties of Ge films were analyzed for different growth and post annealing temperatures varied between 270 degrees C and 730 degrees C. The structures of polycrystalline Ge films were investigated by employing X-ray diffraction (XRD), Raman spectra and scanning electron microscopy (SEM).