Frequency dependence of conductivity in intrinsic amorphous silicon carbide film, assessed through admittance measurement of metal insulator semiconductor structure


OZDEMIR O., ATILGAN İ., AKAOGLU B., Sel K., KATIRCIOGLU B.

THIN SOLID FILMS, vol.497, pp.149-156, 2006 (Peer-Reviewed Journal) identifier identifier

  • Publication Type: Article / Article
  • Volume: 497
  • Publication Date: 2006
  • Doi Number: 10.1016/j.tsf.2005.10.065
  • Journal Name: THIN SOLID FILMS
  • Journal Indexes: Science Citation Index Expanded, Scopus
  • Page Numbers: pp.149-156

Abstract

A slightly carbon rich hydrogenated amorphous silicon carbide (a-SiCx:H) film was deposited by 13.56 MHz plasma enhanced chemical vapor deposition technique on p-type silicon (p-Si) wafer. Admittance analyses of the metal-insulator-semiconductor device (Al/a-SiCx:H/p-Si)from strong accumulation to strong inversion gate bias were achieved within a widespread frequency range (10(1)-10(6) Hz). An adequate equivalent circuit for each bias regime was proposed. The dependence of the ac conductivity both under strong accumulation and inversion on the frequency power-law was interpreted as due to the carrier exchange mechanism by hopping. (c) 2005 Elsevier B.V All rights reserved.